Fig. 1
From: Honeycomb wet scrubber for acidic gas control: modeling and long-term test results

(a) Experimental setup of the HWS at a semiconductor fab, and (b) schematic diagram of the HWS
From: Honeycomb wet scrubber for acidic gas control: modeling and long-term test results
(a) Experimental setup of the HWS at a semiconductor fab, and (b) schematic diagram of the HWS