Comprehensive nontargeted analysis of fluorosurfactant byproducts and reaction products in wastewater from semiconductor manufacturing

Table 3 List of impurities in authentic standards of FBSE, FBSA, and FBSEE diol

Characteristics	Compound	Compound number^a	The relative peak area (%)^b
Standard	FBSE	2a-3	99.50
Impurities in the standard	FPrSE	2a-2	0.211
	E-FBSE	2c-1, 2c-2, 2c-3	0.104
	H-FBSE	2b-1, 2b-2	0.095
	FBSAA	4a-1	0.036
	U-E-FBSE	2f-1	0.033
	FEtSE	2a-1	0.014
	U-FBSE	2e-1	0.007
	Headgroup isomer of FBSAA	4a-2	0.002
	H-E-FBSE	2d-1	0.001
Standard	FBSA	1a-1	99.93
Impurities in the standard	E-FBSA	1c-1 &1c-2	0.062
Impurities in the standard	H-FBSA	1b-1	0.012
Standard	FBSEE diol	3a-1	99.57
Impurities in the standard	H-FBSEE diol	3b-1	0.403

^aCompound number is made up of the subclass and serial number. For each chemical structure, please refer to Table S9 of SM
^bThe relative peak area (%) = Peak area of compound / Sum of peak areas of all compounds

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